Conductive slip rings are high-end precision core rotary components for semiconductor equipment. Specially designed for the automated production, high precision and high reliability requirements of the semiconductor industry, they enable stable transmission of power, encoder signals and various sensitive signals under 360° unlimited rotation. They can be equipped with a central through-hole to accommodate equipment drive shafts, process pipelines and detection cables. They can also integrate pneumatic and hydraulic rotary joints (supporting positive and negative pressure), realizing integrated transmission of electricity, signals, gas and liquid, fully matching semiconductor front-end manufacturing, back-end packaging & testing, full-process inspection and automated supporting equipment.
Core Application Scenarios of Conductive Slip Rings
Suitable for the whole production process of semiconductor wafer processing, chip packaging and finished product inspection, matching the rotary mechanisms of core equipment:
Front-end wafer manufacturing equipment: Photoresist coater & developer, etcher, thin film deposition equipment (PVD/CVD), chemical mechanical polisher (CMP). Used in rotary chucks, target stages and polishing heads, with through-holes for wafer carrying shafts and vacuum/process gas lines.
Back-end packaging & testing equipment: Wafer dicing saws, chip die bonders, wire bonders and molding machines. Matching rotary indexing tables and clamping mechanisms, with through-holes for suction lines, detection and drive cables.
Full-process inspection & sorting equipment: Wafer probe stations, chip appearance inspection machines and electrical performance testing machines. Used in rotary tables and gimbals to ensure high-fidelity transmission of detection signals, with through-holes for lens focusing shafts and probe drive shafts.
Automated supporting equipment: Rotary lifting mechanisms of wafer AGVs, production line manipulators and FOUP handling systems. Matching rotary joints and loading stations to realize miniaturized integrated transmission.